Helium permeation type standard leak VTL-A type
Key words: standard leak | MPCVD | capacitance film gauge vacuum gauge | high and low vacuum calibration device | helium leak calibration device
Classification:
Product Details
Product Introduction
The helium-permeable standard leak is made using the high permeability of helium to most quartz glass or tetrafluoroethylene. This type of leak is not sensitive to pollution; the leakage rate is stable for a long time; the leakage rate can be made very small. The filling gas of helium-permeable standard leak hole is helium, and its leakage rate is generally between 10-5-10-13Pa · m3/s. In addition, the allowable deviation of indication value of helium permeation standard leak is 15%, the temperature compensation is about 3%/C, and it has excellent anti-blocking ability and stable leakage rate for a long time. The outlet valve is manual (optional), the interface is KF25/M14 * 1.5 (internal) or customized, and the outlet is vacuum and can be repeatedly inflated.
The annual attenuation rate varies according to the leakage rate, for example, for a leakage rate of 10-7Pa · m3/s, the annual attenuation rate is less than or equal to 10%/y; for a leakage rate of 10-8Pa · m3/s, the annual attenuation rate is less than or equal to 3%/y; and so on, until the leakage rate of 10-12Pa · m3/s, the annual attenuation rate is less than or equal to 0.1/y. 10-7Pa · m3/s magnitude of the following leak, under normal circumstances is not required to close the outlet valve, but because the customer is not clear about the structure of the leak, the valve is usually closed. For helium leakage, a long time to close the valve will accumulate a certain amount of helium, so that the boundary conditions of the permeable element is destroyed, the use of a short period of time leakage rate value will be too large, open the valve after a period of time (24 hours) after the balance, the leakage rate value will be restored.
The application of helium-permeable standard leak includes the calibration of helium mass spectrometer leak detector, the internal standard leak of helium mass spectrometer leak detector, the calibration of the minimum detectable leak rate of helium mass spectrometer leak detector and the determination of the actual leak rate.
|
Tetrafluoroethylene type （E-5~E-13.)Pa.m3/s |
Glass penetration type （E-8~E-10)Pa.m3/s |
List of Technical Parameters of Helium Leak
Anti-aging and anti-seismic, stable leakage rate, not easy to block
（E-5~E-13.)Pa.m3/s
|
VTL |
-5A |
-6A |
-7A |
-8A |
-9A |
-10A |
-11A |
-12A |
-13A |
||||
|
Leak range |
10-5Pa·m3/s |
10-6Pa·m3/s |
10-7Pa·m3/s |
10-8Pa·m3/s |
10-9Pa·m3/s |
10-10Pa·m3/s |
10-11Pa·m3/s |
10-12Pa·m3/s |
10-13Pa·m3/s |
||||
|
Filling gas |
Helium (He) |
||||||||||||
|
Allowable deviation of indication value |
±15% |
±20% |
±30% |
||||||||||
|
temperature compensation |
Quartz glass about 3%/℃, tetrafluoroethylene about 2.5/℃ |
||||||||||||
|
Leak element |
Quartz glass, tetrafluoroethylene
|
quartz glass |
|||||||||||
|
Anti-clogging ability |
Excellent |
||||||||||||
|
Stability |
Stable leakage rate for a long time |
||||||||||||
|
Valve |
Manual (optional) |
||||||||||||
|
Interface |
KF25/KF16/CF/M14 * 1.5 (inside) or customized |
||||||||||||
|
Export |
Vacuum |
||||||||||||
|
Helium chamber volume |
1000mL |
300mL |
150mL/200 mL |
||||||||||
|
Inflation pressure |
60atm |
60atm |
20~30atm |
1atm |
|||||||||
|
annual attenuation |
<10% |
<5% |
<2% |
<1% |
|||||||||
|
Calibration Certificate |
Dongbei CNAS laboratory or third party certificate |
||||||||||||
Related Products
Product inquiry
Address
9959 Songze Avenue, Qingpu District, Shanghai
WeChat Sweep
Follow our official WeChat