Expansion method vacuum device
Key words: standard leak | MPCVD | capacitance film gauge vacuum gauge | high and low vacuum calibration device | helium leak calibration device
Classification:
Product Details
I. Overview
This vacuum standard device is mainly used for verification/calibration of capacitance film vacuum gauges and thermocouple vacuum gauges in the range of (1.3 × 105~1.3 × 10-1) Pa. It mainly has the following characteristics:
The 1.1 takes into account both the comparative method and the expansion method, which is convenient for customers to master flexibly and ensure that the equipment can be used for a long time;
All instruments and equipment selected as part of the 1.2 expansion process provide a long term warranty. The standard capacitor film gauge for comparison method is guaranteed by the original factory.
1.3 using special software for data acquisition and processing, high efficiency;
The 1.4 system software is upgraded free of charge for life, and the overall level of the device has reached the domestic advanced level.
Two main technical indicators
2.1 equipment: expansion system, air extraction system, pre-pressure measurement system, control system and other components.
Principle of 2.2 technology: static comparison method, primary expansion;
2.3 measurement range:(1.3 × 105~1.332 × 10 ) Pa;
2.4 ultimate vacuum degree: ≤ 1 × 10-4Pa;
Technical requirements for 2.5 uncertainty::
(1.332 × 105~1.332Pa × 103)Pa U ≤ 0.08 % k = 2 static comparison method;
(1.332 × 103~13.32Pa) U≤ 0.2% k = 2 primary expansion;
(13.32 × 10~1.332Pa) U≤ 0.5% k = 2 primary expansion;
(1.332 × 10~0.1332Pa) U≤ 1% k = 2 primary expansion
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