Helium leak calibration device
Key words: standard leak | MPCVD | capacitance film gauge vacuum gauge | high and low vacuum calibration device | helium leak calibration device
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Technical configuration
This document addresses the composition, operation, and maintenance of DBLS10-5 helium leak calibration devices. This device is suitable for measuring and testing units to carry out standard leak calibration, value traceability. The system structure is simple, easy to operate, maintenance, high efficiency.
1. Environmental conditions for equipment use:
Ambient temperature 20±5 ℃
Relative humidity <85% RH
Power supply voltage 220V
2. Technical indicators:
Standard leak calibration range (1 × 10-4~1 × 10-10)Pa • m3/s,
Uncertainty: U =(10~15)%(k = 2);
The minimum detectable leakage rate of helium (vacuum mode) is less than 5E-12mbar • L/s;
The maximum inlet pressure in ULTRA mode is less than 0.4mbar;
Durable mass spectrometry system with two filament ion sources (3 year warranty);
Special calibration software can realize computer data acquisition, leakage rate calculation and original record generation;
Meet the measurement requirements of the JJF1833-2020 Vacuum Helium Standard Leak Calibration Specification.
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